New Tool for Absolute Temperature Measurement
k-Space Associates has announced the worldwide release of its newest product, kSA SpectraTemp, a self-calibrating absolute source temperature measurement tool.
k-Space CEO, Darryl Barlett, commented, "Absolute temperature is a very difficult parameter to measure. With kSA SpectraTemp, if the source radiation is blackbody-like, an absolute temperature is instantly determined."
kSA SpectraTemp is a non-contact, optically-based technique for measuring the temperature of semiconductor wafers, metals, ceramics, and more. It is based on patented technology that analyzes the spectral radiation profile utilizing a solid-state spectrometer, resulting in, the company says, fast data acquisition and real-time temperature measurement. The user simply reads the temperature from the screen.
MOCVD and other thin-film deposition facilities can use it to measure absolute temperature on wafer carriers, providing more accurate and reliable temperatures and tool-to-tool matching. As production facilities adopt this technology and gain better temperature control, device yield and quality will improve.