News Article
Feel The Pressure
ALPS develops piezoresistive type MEMS pressure sensor to detect absolute pressure.
ALPS ELECTRIC has completed development of a piezoresistive type MEMS pressure sensor (to detect absolute pressure) using barometric and altitude sensors.
The application of pressure sensors is continuing to expand, with a wide variety of uses in automotive, medical and industrial devices, as well as in consumer devices such as washing machines. With recent consideration given to adding altitude detection functions to Portable Navigation Devices (PNDs) and pedometers, there is a continual need for pressure sensors mounted in these compact portable devices to be even more compact and thin.
Through the use of its propriety thin film process, microfabrication and package technologies cultivated over many years, ALPS ELECTRIC has developed this piezoresistive-type pressure sensor, the world's smallest and shortest class of sensor, to detect absolute pressure. The single element, compact-type has a length of 2.5mm, a depth of 2.5mm and height of 0.7mm, while the built in amplifier hybrid type has a length of 3.5mm, a depth of 3.5mm and height of 1.0mm.
These sensors, which can be surface mounted, detect pressure by reading the electrical signals that result from changes in electrical resistance generated when external pressure causes the diaphragm to flex and distorts the piezoresistive element formed above the diaphragm. The diaphragm's flexible volume is exerted directly as changes in the electrical resistance of the piezoresistive element through the use of a single element structure, making this method suitable for compact sized components. Through the use of ALPS ELECTRIC's proprietary microfabrication technology, sensor elements have been minimised, realising a product that is compact and thin.
In addition, this product features minimal fluctuation characteristics due to the stable cavity configuration resulting from etching optimisation, Si-Si sealed joints that control the impact of external component stress, and the use of ceramic materials that are resistant to fluctuations in temperature.
The application of pressure sensors is continuing to expand, with a wide variety of uses in automotive, medical and industrial devices, as well as in consumer devices such as washing machines. With recent consideration given to adding altitude detection functions to Portable Navigation Devices (PNDs) and pedometers, there is a continual need for pressure sensors mounted in these compact portable devices to be even more compact and thin.
Through the use of its propriety thin film process, microfabrication and package technologies cultivated over many years, ALPS ELECTRIC has developed this piezoresistive-type pressure sensor, the world's smallest and shortest class of sensor, to detect absolute pressure. The single element, compact-type has a length of 2.5mm, a depth of 2.5mm and height of 0.7mm, while the built in amplifier hybrid type has a length of 3.5mm, a depth of 3.5mm and height of 1.0mm.
These sensors, which can be surface mounted, detect pressure by reading the electrical signals that result from changes in electrical resistance generated when external pressure causes the diaphragm to flex and distorts the piezoresistive element formed above the diaphragm. The diaphragm's flexible volume is exerted directly as changes in the electrical resistance of the piezoresistive element through the use of a single element structure, making this method suitable for compact sized components. Through the use of ALPS ELECTRIC's proprietary microfabrication technology, sensor elements have been minimised, realising a product that is compact and thin.
In addition, this product features minimal fluctuation characteristics due to the stable cavity configuration resulting from etching optimisation, Si-Si sealed joints that control the impact of external component stress, and the use of ceramic materials that are resistant to fluctuations in temperature.
